The Electro-Photonic Integrated Chip Research Group of the School of Information and Electronic Engineering of Zhejiang University currently has an electrical laboratory and an optical laboratory. The laboratory has a complete semiconductor optoelectronic device software simulation platform, first-class optoelectronic chip and device test system. And it can complete the material growth, fabrication and packaging process of semiconductor optoelectronic devices with the help of Zhejiang University-level micro-nano processing center .
Software simulation platform
The lab has multiple Lenovo high-performance simulation servers. The typical server configuration includes two 20-core CPUs and 384G memory. The research group used a variety of optoelectronic device development software, including R-Soft, Lumerical, HFSS, Tanner L-edit, COMSOL, Cadence and other electrical, optical and process simulation software, and established a cooperative relationship with some software manufacturers. The high-performance simulation server hardware platform and complete optoelectronic simulation software platform provide sufficient software and hardware conditions for optoelectronic device design and optimization.
Device test system
The laboratory has a complete set of optoelectronic chip and device test platforms, including laser systems, time-frequency domain measurement systems, signal generation and modulation systems, and RF test systems. The main equipment includes:
1)Laser system
Santec C+L band wavelength tunable laser, low noise fiber amplifier, high power fiber amplifier, Santec O-band wavelength tunable laser, O-band optical amplifier, bandwidth/wavelength tunable filter, multi-channel optical power meter, etc.
2) Time-frequency domain measurement system
Yokokawa spectrum analyzer, R&S 40GHz spectrum analyzer, 40GHz vector network analyzer, real-time oscilloscope, Tektronix 80GHz optical/electrical digital serial analysis sampling oscilloscope, etc.
3) Signal generation and modulation system
SHF high-speed digital code signal generator, 40GHz C/O band electro-optic modulator, 40GHz photodetector, optical polarization synthesis and analyzer.
4)
RF test system
60GHz microwave bandwidth amplifier, DC bias, RF signal cable, high frequency GSG probe and calibration parts.
Micro-nano optical chip coupling test system
50nm resolution 5D fiber vertical coupling test platform, 2nm resolution 6D fiber horizontal coupling test platform, visible/infrared integrated observation system, fiber optic chip alignment package platform, etc.
Micro-nano processing platform
The processing of the research group's devices relies on the Zhejiang University's public research experimental platform - Micro-Nano Processing Center. The center is managed and operated by the college of Information Science & Electronic Engineering. The central building area is 1200㎡ and the purification area is 1000㎡. Material growth equipment such as molecular beam epitaxy (MBE), plasma enhanced chemical vapor deposition (PECVD), high-performance electron beam exposure (EBL) system, double-sided lithography, laser direct writing and other etching equipment, and electron beam Evaporation, vacuum coating and other evaporation equipment. At the same time, the research team and the Singapore Microelectronics Research Institute and other international and domestic mainstream device OEMs have long maintained good cooperative relations, which provides guarantee for the production of research group optoelectronic devices.
